Volume 1 Issue 3
September  2022
Turn off MathJax
Article Contents
Wangqi Dai, Yan Qiao, Ziqiang Ma, Tian Wang, Zhengwen Fu. All-solid-state thin-film batteries based on lithium phosphorus oxynitrides[J]. Materials Futures, 2022, 1(3): 032101. doi: 10.1088/2752-5724/ac7db2
Citation: Wangqi Dai, Yan Qiao, Ziqiang Ma, Tian Wang, Zhengwen Fu. All-solid-state thin-film batteries based on lithium phosphorus oxynitrides[J]. Materials Futures, 2022, 1(3): 032101. doi: 10.1088/2752-5724/ac7db2
Topical Review •
OPEN ACCESS

All-solid-state thin-film batteries based on lithium phosphorus oxynitrides

© 2022 The Author(s). Published by IOP Publishing Ltd on behalf of the Songshan Lake Materials Laboratory
Materials Futures, Volume 1, Number 3
  • Received Date: 2022-05-18
  • Accepted Date: 2022-07-01
  • Publish Date: 2022-09-23
  • Lithium phosphorus oxygen nitrogen (LiPON) as solid electrolyte discovered by Bates et al in the 1990s is an important part of all-solid-state thin-film battery (ASSTFB) due to its wide electrochemical stability window and negligible low electronic conductivity. However, the ionic conductivity of LiPON about 2 × 10−6 S cm−1 at room temperature is much lower than that of other types of solid electrolytes, which seriously limits the application of ASSTFBs. This review summarizes the research and progress in ASSTFBs based on LiPON, in the solid-state electrolyte of LiPON-derivatives with adjustable chemical compositions of the amorphous structure for the improvement of the ionic conductivity and electrochemical stability, in the critical interface issues between LiPON and electrodes, and in preparation methods for LiPON. This review is helpful for people to understand the interface characteristics and various preparation methods of LiPON in ASSTFBs. The key issues to be addressed concern how to develop solid-state electrolyte films with high conductivity and high-quality interface engineering as well as large-scale preparation technology, so as to realize the practical application of highly integrated ASSTFBs.

  • loading
  • [1]
    Notten P H L, Roozeboom F, Niessen R A H and Baggetto L 2007 3D integrated all-solid-state rechargeable batteries Adv. Mater. 19 4564–7
    [2]
    Jetybayeva A, Uzakbaiuly B, Mukanova A, Myung S-T and Bakenov Z 2021 Recent advancements in solid electrolytes integrated into all-solid-state 2D and 3D lithium-ion microbatteries J. Mater. Chem. A 9 15140–78
    [3]
    Song J, Yang X, Zeng S-S, Cai M-Z, Zhang L-T, Dong Q-F, Zheng M-S, Wu S-T and Wu Q-H 2009 Solid-state microscale lithium batteries prepared with microfabrication processes J. Micromech. Microeng. 19 045004
    [4]
    Kanehori K, Matsumoto K, Miyauchi K and Kudo T 1983 Thin film solid electrolyte and its application to secondary lithium cell Solid State Ion. 9–10 1445–8
    [5]
    Lee H, Kim S, Kim K-B and Choi J-W 2018 Scalable fabrication of flexible thin-film batteries for smart lens applications Nano Energy 53 225–31
    [6]
    Vallone M, Alleri M, Bono F and Catania P 2020 A new wireless device for real-time mechanical impact evaluation in a citrus packing line Trans. ASABE 63 1–9
    [7]
    Lee H, Lim K Y, Kim K-B, Yu J-W, Choi W K and Choi J-W 2020 Hybrid thin-film encapsulation for all-solid-state thin-film batteries ACS Appl. Mater. Interfaces 12 11504–10
    [8]
    Kutbee A T et al 2017 Flexible and biocompatible high-performance solid-state micro-battery for implantable orthodontic system npj Flex. Electron. 1 7
    [9]
    Kanehori K, Ito Y, Kirino F, Miyauchi K and Kudo T 1986 Titanium disulfide films fabricated by plasma CVD Solid State Ion. 18–19 818–22
    [10]
    Kirino F, Ito Y, Miyauchi K and Kudo T 1986 Electrochemical behavior of amorphous thin films of sputtered V2O5-WO3 mixed conductors Nippon Kagaku Kaishi 1986 445–50
    [11]
    Yamaki J 1996 Rechargeable lithium thin film cells with inorganic electrolytes Solid State Ion. 86–88 1279–84
    [12]
    Ohtsuka H 1989 Electrical characteristics of Li2O_V2O5_SiO2 thin films Solid State Ion. 35 201–6
    [13]
    Ohtsuka H, Okada S and Yamaki J 1990 Solid state battery with Li2O-V2O5-SiO2 solid electrolyte thin film Solid State Ion. 40–41 964–6
    [14]
    Jones S D 1992 A thin film solid state microbattery Solid State Ion. 53 628–34
    [15]
    Akridge J R and Vourlis H 1986 Solid state batteries using vitreous solid electrolytes Solid State Ion. 18–19 1082–7
    [16]
    Akridge J R and Vourlis H 1988 Performance of Li/TiS2 solid state batteries using phosphorous chalcogenide network former glasses as solid electrolyte Solid State Ion. 28 841–6
    [17]
    Jones S D, Akridge J R and Shokoohi F K 1994 Thin film rechargeable Li batteries Solid State Ion. 69 357–68
    [18]
    Bates J B, Gruzalski G R, Dudney N J, Luck C F and Yu X H 1994 Rechargeable thin-film lithium batteries Solid State Ion. 70 619–28
    [19]
    Bates J B 2000 Thin-film lithium and lithium-ion batteries Solid State Ion. 135 33–45
    [20]
    Yu X H, Bates J B, Jellison G E and Hart F X 1997 A stable thin-film lithium electrolyte: lithium phosphorus oxynitride J. Electrochem. Soc. 144 524–32
    [21]
    Neudecker B J, Dudney N J and Bates J B 2000 “Lithium-free” thin-film battery with in situ plated Li anode J. Electrochem. Soc. 147 517–23
    [22]
    Whitacre J F, West W C and Ratnakumar B V 2003 A combinatorial study of Liy Mnx Ni2−x O4 cathode materials using microfabricated solid-state electrochemical cells J. Electrochem. Soc. 150 A1676–83
    [23]
    West W C, Whitacre J F and Ratnakumar B V 2003 Radio frequency magnetron-sputtered LiCoPO4 Cathodes for 4.8 V thin-film batteries J. Electrochem. Soc. 150 A1660–66
    [24]
    Park Y-S, Lee S-H, Lee B-I and Joo S-K 1999 All-solid-state lithium thin-film rechargeable battery with lithium manganese oxide Electrochem. Solid-State Lett. 2 58–59
    [25]
    Jeon E J, Shin Y W, Nam S C, Cho W I and Yoon Y S 2001 Characterization of all-solid-state thin-film batteries with V2 O5 thin-film cathodes using ex situ and in situ processes J. Electrochem. Soc. 148 A318–22
    [26]
    Baba M 1999 Fabrication and electrochemical characteristics of all-solid-state lithium-ion batteries using V2 O5 thin films for both electrodes Electrochem. Solid-State Lett. 2 320–2
    [27]
    Baba M, Kumagai N, Fujita N, Ohta K, Nishidate K, Komaba S, Groult H, Devilliers D and Kaplan B 2001 Fabrication and electrochemical characteristics of all-solid-state lithium-ion rechargeable batteries composed of LiMn2O4 positive and V2O5 negative electrodes J. Power Sources 97–98 798–800
    [28]
    Baba M, Kumagai N, Fujita H, Ohta K, Nishidate K, Komaba S, Kaplan B, Groult H and Devilliers D 2003 Multi-layered Li-ion rechargeable batteries for a high-voltage and high-current solid-state power source J. Power Sources 119 914–7
    [29]
    Creus R 1992 Thin films of ionic and mixed conductive glasses: their use in microdevices Solid State Ion. 53 641–6
    [30]
    Menetrier M, Levasseur V, Delmas C, Audebert J F and Hagenmuller P 1984 New secondary batteries for room temperature applications using a vitreous electrolyte Solid State Ion. 14 257–61
    [31]
    Balkanski M, Julien C and Emery J Y 1989 Integrable lithium solid-state microbatteries J. Power Sources 26 615–22
    [32]
    Creus R, Sarradin J, Astier R, Pradel A and Ribes M 1989 The use of ionic and mixed conductive glasses in microbatteries Mater. Sci. Eng. B 3 109–12
    [33]
    Jourdaine L 1988 Lithium solid state glass-based microgenerators Solid State Ion. 28 1490–4
    [34]
    Kuwata N, Kawamura J, Toribami K, Hattori T and Sata N 2004 Thin-film lithium-ion battery with amorphous solid electrolyte fabricated by pulsed laser deposition Electrochem. Commun. 6 417–21
    [35]
    Zheng S, Shi X, Das P, Wu Z-S and Bao X 2019 The road towards planar microbatteries and micro-supercapacitors: from 2D to 3D device geometries Adv. Mater. 31 1900583
    [36]
    Koo M, Park K-I, Lee S H, Suh M, Jeon D Y, Choi J W, Kang K and Lee K J 2012 Bendable inorganic thin-film battery for fully flexible electronic systems Nano Lett. 12 4810–6
    [37]
    Hallot M, Demortiere A, Roussel P and Lethien C 2018 Sputtered LiMn1.5Ni0.5O4 thin films for Li-ion micro-batteries with high energy and rate capabilities Energy Storage Mater. 15 396–406
    [38]
    Trask J, Anapolsky A, Cardozo B, Januar E, Kumar K, Miller M, Brown R and Bhardwaj R 2017 Optimization of 10-µm, sputtered, LiCoO2 cathodes to enable higher energy density solid state batteries J. Power Sources 350 56–64
    [39]
    Yamamoto T, Iwasaki H, Suzuki Y, Sakakura M, Fujii Y, Motoyama M and Iriyama Y 2019 A Li-free inverted-stack all-solid-state thin film battery using crystalline cathode material Electrochem. Commun. 105 106494
    [40]
    Xia Q Y et al 2021 Tunnel intergrowth LixMnO2 nanosheet arrays as 3D cathode for high-performance all-solid-state thin film lithium microbatteries Adv. Mater. 33 2003524
    [41]
    Sun S, Xia Q Y, Liu J Z, Xu J, Zan F, Yue J L, Savilov S V, Lunin V V and Xia H 2019 Self-standing oxygen-deficient α-MoO3-x nanoflake arrays as 3D cathode for advanced all-solid-state thin film lithium batteries J. Materiomics 5 229–36
    [42]
    Chen X B, Sastre J, Rumpel M, Flegler A, Singhania A, Bonner J B, Hoffmann P and Romanyuk Y E 2021 Photonic methods for rapid crystallization of LiMn2O4 cathodes for solid-state thin-film batteries J. Power Sources 495 229424
    [43]
    Chen X B, Sastre J, Aribia A, Gilshtein E and Romanyuk Y E 2021 Flash lamp annealing enables thin-film solid-state batteries on aluminum foil ACS Appl. Energy Mater. 4 5408–14
    [44]
    Wang C L, Dai X Y, Guan X, Jia W S, Bai Y and Li J Z 2020 LiCoO2 thin film cathode sputtered onto 500 ◦C substrate Electrochim. Acta 354 136668
    [45]
    Zhang Y M, Marschilok A C, Takeuchi K J, Kercher A K, Takeuchi E S and Dudney N J 2019 Understanding how structure and crystallinity affect performance in solid-state batteries using a glass ceramic LiV3O8 cathode Chem. Mater. 31 6135–44
    [46]
    Yim H, Yu S-H, Baek S H, Sung Y-E and Choi J-W 2020 Directly integrated all-solid-state flexible lithium batteries on polymer substrate J. Power Sources 455 227978
    [47]
    Gockeln M, Glenneberg J, Busse M, Pokhrel S, Madler L and Kun R 2018 Flame aerosol deposited Li4Ti5O12 layers for flexible, thin film all-solid-state Li-ion batteries Nano Energy 49 564–73
    [48]
    Nishio K, Horiba K, Nakamura N, Kitamura M, Kumigashira H, Shimizu R and Hitosugi T 2019 Bottom-current-collector-free thin-film batteries using LiNi0.8Co0.2O2 epitaxial thin films J. Power Sources 416 56–61
    [49]
    Nishio K, Nakamura N, Horiba K, Kitamura M, Kumigashira H, Shimizu R and Hitosugi T 2020 Low resistance at LiNi1/3Mn1/3Co1/3O2 and Li3PO4 interfaces Appl. Phys. Lett. 116 053901
    [50]
    Fu Z-W 1999 Pulsed laser deposited Ta2O5 thin films as an electrochromic material Electrochem. Solid-State Lett. 2 600–1
    [51]
    Ding F 1999 Electrochromic properties of ZnO thin films prepared by pulsed laser deposition Electrochem. Solid-State Lett. 2 418–9
    [52]
    Fu Z-W, Chen L-Y and Qin Q-Z 1999 Electrical characterization of Ta2O5 films deposited by laser reactive ablation of metallic Ta Thin Solid Films 340 164–8
    [53]
    Ding F, Fu Z W, Zhou M F and Qin Q Z 1999 Tin-based composite oxide thin-film electrodes prepared by pulsed laser deposition J. Electrochem. Soc. 146 3554–9
    [54]
    Chu Y-Q and Qin Q-Z 2002 Fabrication and characterization of silver−V2O5 composite thin films as lithium-ion insertion materials Chem. Mater. 14 3152–7
    [55]
    Wang Y and Qin Q-Z 2002 A nanocrystalline NiO thin-film electrode prepared by pulsed laser ablation for Li-Ion batteries J. Electrochem. Soc. 149 A873–78
    [56]
    Wang Y, Fu Z-W, Yue X-L and Qin Q-Z 2004 Electrochemical reactivity mechanism of Ni3N with lithium J. Electrochem. Soc. 151 E162–67
    [57]
    Fu Z-W, Li C-L, Liu W-Y, Ma J, Wang Y and Qin Q-Z 2005 Electrochemical reaction of lithium with cobalt fluoride thin film electrode J. Electrochem. Soc. 152 E50–55
    [58]
    Zhao S L, Fu Z W and Qin Q Z 2002 A solid-state electrolyte lithium phosphorus oxynitride film prepared by pulsed laser deposition Thin Solid Films 415 108–13
    [59]
    Zhao S L and Qin Q Z 2003 Li V Si O thin film electrolyte for all-solid-state Li-ion battery J. Power Sources 122 174–80
    [60]
    Liu W-Y, Fu Z-W, Li C-L and Qin Q-Z 2004 Lithium phosphorus oxynitride thin film fabricated by a nitrogen plasma-assisted deposition of e-beam reaction evaporation Electrochem. Solid-State Lett. 7 J36–J40
    [61]
    Li C-L and Fu Z-W 2007 All-solid-state rechargeable thin film lithium batteries with LixMn2O4 and LixMn2O4–0.5ZrO2 cathodes Electrochim. Acta 52 6155–64
    [62]
    Liu W-Y, Fu Z-W and Qin Z 2008 A “lithium-free” thin-film battery with an unexpected cathode layer J. Electrochem. Soc. 155 A8–A13
    [63]
    Shi D-R, Fu J, Shadike Z, Cao M-H, Wang W-W and Fu Z-W 2018 All-solid-state rechargeable lithium metal battery with a Prussian blue cathode prepared by a nonvacuum coating technology ACS Omega 3 7648–54
    [64]
    Bates J B, Dudney N J, Gruzalski G R, Zuhr R A, Choudhury A, Luck C F and Robertson J D 1993 Fabrication and characterization of amorphous lithium electrolyte thin films and rechargeable thin-film batteries J. Power Sources 43 103–10
    [65]
    Lacivita V, Westover A S, Kercher A, Phillip N D, Yang G, Veith G, Ceder G and Dudney N J 2018 Resolving the amorphous structure of lithium phosphorus oxynitride (Lipon) J. Am. Chem. Soc. 140 11029–38
    [66]
    Lee S-J, Bae J-H, Lee H-W, Baik H-K and Lee S-M 2003 Electrical conductivity in Li–Si–P–O–N oxynitride thin-films J. Power Sources 123 61–64
    [67]
    Lee S-J, Baik H-K and Lee S-M 2003 An all-solid-state thin film battery using LISIPON electrolyte and Si–V negative electrode films Electrochem. Commun. 5 32–35
    [68]
    Su Y R et al 2017 Electrochemical properties and optical transmission of high Li+ conducting LiSiPON electrolyte films Phys. Status Solidi b 254 1600088
    [69]
    Famprikis T, Galipaud J, Clemens O, Pecquenard B and Le Cras F 2019 Composition dependence of ionic conductivity in LiSiPO(N) thin-film electrolytes for solid-state batteries ACS Appl. Energy Mater. 2 4782–91
    [70]
    Temeche E, Zhang X and Laine R M 2020 Solid electrolytes for Li–S batteries: solid solutions of poly(ethylene oxide) with LixPON- and LixSiPON-based polymers ACS Appl. Mater. Interfaces 12 30353–64
    [71]
    Temeche E, Zhang X and Laine R M 2020 Polymer precursor derived LixPON electrolytes: toward Li–S batteries ACS Appl. Mater. Interfaces 12 20548–62
    [72]
    Zhang X, Temeche E and Laine R M 2020 Lix SiON (x = 2, 4, 6): a novel solid electrolyte system derived from agricultural waste Green Chem. 22 7491–505
    [73]
    Zhang X, Temeche E and Laine R M 2020 Design, synthesis, and characterization of polymer precursors to LixPON and LixSiPON glasses: materials that enable all-solid-state batteries (ASBs) Macromolecules 53 2702–12
    [74]
    Wu F, Liu Y, Chen R, Chen S and Wang G 2009 Preparation and performance of novel Li–Ti–Si–P–O–N thin-film electrolyte for thin-film lithium batteries J. Power Sources 189 467–70
    [75]
    Joo K-H, Sohn H-J, Vinatier P, Pecquenard B and Levasseur A 2004 Lithium ion conducting lithium sulfur oxynitride thin film Electrochem. Solid-State Lett. 7 A256–58
    [76]
    Joo K H 2003 Thin film lithium ion conducting LiBSO solid electrolyte Solid State Ion. 160 51–59
    [77]
    Müller C R, Johansson P, Karlsson M, Maass P and Matic A 2008 Structure of glassy lithium sulfate films sputtered in nitrogen: insight from Raman spectroscopy and ab initio calculations Phys. Rev. B 77 094116
    [78]
    Kurzman J A, Jouan G, Courty M, Rosa Palacin M, Armand M and Recham N 2013 Brønsted acid–base reactions with anhydrous sulfamates as a pathway to
    [SO3N]3−-containing compounds: preparation of Li3SO3N Solid State Sci. 25 28–32
    [79]
    Mascaraque N, Takebe H, Tricot G, Fierro J L G, Durán A and Muñoz F 2014 Structure and electrical properties of a new thio-phosphorus oxynitride glass electrolyte J. Non-Cryst. Solids 405 159–62
    [80]
    Mascaraque N, Fierro J L G, Muñoz F, Durán A, Ito Y, Hibi Y, Harada R, Kato A, Hayashi A and Tatsumisago M 2015 Thio-oxynitride phosphate glass electrolytes prepared by mechanical milling J. Mater. Res. 30 2940–8
    [81]
    Michel F, Kuhl F, Becker M, Janek J and Polity A 2019 Electrochemical and optical properties of lithium ion conducting LiPSON solid electrolyte films Phys. Status Solidi b 256 1900047
    [82]
    Michel F, Becker M, Janek J and Polity A 2020 Investigations of the solid electrolyte interphase using x-ray photoelectron spectroscopy in situ experiment on the lithium-based solid electrolyte LiPSON Phys. Status Solidi b 257 1900336
    [83]
    Lupo C, Michel F, Kuhl F, Su Y R, Becker M, Polity A and Schlettwein D 2021 Investigation of sputter-deposited thin films of lithium phosphorous sulfuric oxynitride (LiPSON) as solid electrolyte for electrochromic devices Phys. Status Solidi b 258 2100032
    [84]
    Kim J M, Park G B, Lee K C, Park H Y, Nam S C and Song S W 2009 Li–B–O–N electrolytes for all-solid-state thin film batteries J. Power Sources 189 211–6
    [85]
    Dussauze M, Kamitsos E I, Johansson P, Matic A, Varsamis C P E, Cavagnat D, Vinatier P and Hamon Y 2013 Lithium ion conducting boron-oxynitride amorphous thin films: synthesis and molecular structure by infrared spectroscopy and density functional theory modeling J. Phys. Chem. C 117 7202–13
    [86]
    Birke P and Weppner W 1997 Electrochemical analysis of thin film electrolytes and electrodes for application in rechargeable all solid state lithium microbatteries Electrochim. Acta 42 3375–84
    [87]
    Li S, Yunchao X and Zhuangqi H 2018 Dislocation structure in a single crystal nickel base superalloy during high cycle fatigue at 870 ◦C Rare Metal. Mater. Eng. 47 3835–8
    [88]
    Song S-W, Lee K-C and Park H-Y 2016 High-performance flexible all-solid-state microbatteries based on solid electrolyte of lithium boron oxynitride J. Power Sources 328 311–7
    [89]
    Wu F, Zheng Y, Li L, Tan G, Chen R and Chen S 2013 Novel micronano thin film based on Li–B–P–O target incorporating nitrogen as electrolyte: how does local structure influence chemical and electrochemical performances? J. Phys. Chem. C 117 19280–7
    [90]
    Yoon Y, Park C, Kim J and Shin D 2013 The mixed former effect in lithium borophosphate oxynitride thin film electrolytes for all-solid-state micro-batteries Electrochim. Acta 111 144–51
    [91]
    Mascaraque N, Tricot G, Revel B, Durán A and Muñoz F 2014 Nitrogen and fluorine anionic substitution in lithium phosphate glasses Solid State Ion. 254 40–47
    [92]
    Xia H-Y et al 2021 A new carbon-incorporated lithium phosphate solid electrolyte J. Power Sources 514 230603
    [93]
    Jee S H, Lee M-J, Ahn H S, Kim D-J, Choi J W, Yoon S J, Nam S C, Kim S H and Yoon Y S 2010 Characteristics of a new type of solid-state electrolyte with a LiPON interlayer for Li-ion thin film batteries Solid State Ion. 181 902–6
    [94]
    Chen H, Tao H, Zhao X and Wu Q 2011 Fabrication and ionic conductivity of amorphous Li–Al–Ti–P–O thin film J. Non-Cryst. Solids 357 3267–71
    [95]
    Tan G, Wu F, Li L, Liu Y and Chen R 2012 Magnetron sputtering preparation of nitrogen-incorporated lithium–aluminum–titanium phosphate based thin film electrolytes for all-solid-state lithium ion batteries J. Phys. Chem. C 116 3817–26
    [96]
    Luo Z, Lu A, Liu T, Song J and Han G 2016 La2O3 substitution in Li-Al-P-O-N glasses for potential solid electrolytes applications Solid State Ion. 295 104–10
    [97]
    Mousavi T, Slattery I, Jagger B, Liu J, Speller S and Grovenor C 2021 Development of sputtered nitrogen-doped Li1+xAlxGe2-x(PO4)3 thin films for solid state batteries Solid State Ion. 364 115613
    [98]
    Jeong E, Hong C, Tak Y, Nam S C and Cho S 2006 Investigation of interfacial resistance between LiCoO2 cathode and LiPON electrolyte in the thin film battery J. Power Sources 159 223–6
    [99]
    Wang Z, Lee J Z, Xin H L, Han L, Grillon N, Guy-Bouyssou D, Bouyssou E, Proust M and Meng Y S 2016 Effects of cathode electrolyte interfacial (CEI) layer on long term cycling of all-solid-state thin-film batteries J. Power Sources 324 342–8
    [100]
    Iriyama Y, Kako T, Yada C, Abe T and Ogumi Z 2005 Charge transfer reaction at the lithium phosphorus oxynitride glass electrolyte/lithium cobalt oxide thin film interface Solid State Ion. 176 2371–6
    [101]
    Choi K-H, Jeon J-H, Park H-K and Lee S-M 2010 Electrochemical performance and thermal stability of LiCoO2 cathodes surface-modified with a sputtered thin film of lithium phosphorus oxynitride J. Power Sources 195 8317–21
    [102]
    Jacke S, Song J, Cherkashinin G, Dimesso L and Jaegermann W 2010 Investigation of the solid-state electrolyte/cathode LiPON/LiCoO2 interface by photoelectron spectroscopy Ionics 16 769–75
    [103]
    Zhou Y-F, Yang M-Z, She F-Q, Gong L, Zhang X-Q, Chen J, Song S-Q and Xie F-Y 2021 Application of x-ray photoelectron spectroscopy to study interfaces for solid-state lithium ion battery Acta Phys. Sin. 70 178801
    [104]
    Schwöbel A, Jaegermann W and Hausbrand R 2016 Interfacial energy level alignment and energy level diagrams for all-solid Li-ion cells: impact of Li-ion transfer and double layer formation Solid State Ion. 288 224–8
    [105]
    Fingerle M, Buchheit R, Sicolo S, Albe K and Hausbrand R 2017 Reaction and space charge layer formation at the LiCoO2—LiPON Interface: insights on defect formation and ion energy level alignment by a combined surface science–simulation approach Chem. Mater. 29 7675–85
    [106]
    Lv S, Li M, Luo X, Cheng J and Li Z 2020 High-voltage LiNi0.5Mn1.5O4 thin film cathodes stabilized by LiPON solid electrolyte coating to enhance cyclic stability and rate capability J. Alloys Compd. 815 151636
    [107]
    Yada C, Ohmori A, Ide K, Yamasaki H, Kato T, Saito T, Sagane F and Iriyama Y 2014 Dielectric modification of 5V-Class cathodes for high-voltage all-solid-state lithium batteries Adv. Energy Mater. 4 1301416
    [108]
    West W C, Hood Z D, Adhikari S P, Liang C, Lachgar A, Motoyama M and Iriyama Y 2016 Reduction of charge-transfer resistance at the solid electrolyte—electrode interface by pulsed laser deposition of films from a crystalline Li2PO2N source J. Power Sources 312 116–22
    [109]
    Cherkashinin G, Yu Z, Eilhardt R, Alff L and Jaegermann W 2020 The effect of interfacial charge distribution on chemical compatibility and stability of the high voltage electrodes (LiCoPO4, LiNiPO4)/solid electrolyte (LiPON) interface Adv. Mater. Interfaces 7 2000276
    [110]
    Zhang X-Q, Cheng X-B and Zhang Q 2018 Advances in interfaces between li metal anode and electrolyte Adv. Mater. Interfaces 5 1701097
    [111]
    Schwöbel A, Hausbrand R and Jaegermann W 2015 Interface reactions between LiPON and lithium studied by in-situ x-ray photoemission Solid State Ion. 273 51–54
    [112]
    Hood Z D, Chen X, Sacci R L, Liu X, Veith G M, Mo Y, Niu J, Dudney N J and Chi M 2021 Elucidating interfacial stability between lithium metal anode and li phosphorus oxynitride via in situ electron microscopy Nano Lett. 21 151–7
    [113]
    Xiao C-F, Kim J H, Cho S-H, Park Y C, Kim M J, Chung K-B, Yoon S-G, Jung J-W, Kim I-D and Kim H-S 2021 Ensemble design of electrode–electrolyte interfaces: toward high-performance thin-film all-solid-state li–metal batteries ACS Nano 15 4561–75
    [114]
    Sicolo S, Fingerle M, Hausbrand R and Albe K 2017 Interfacial instability of amorphous LiPON against lithium: a combined Density Functional Theory and spectroscopic study J. Power Sources 354 124–33
    [115]
    You Y-W, Cui J-W, Zhang X-F, Zheng F, Wu S-Q and Zhu Z-Z 2021 Properties of lithium phosphorus oxynitride (LiPON) solid electrolyte—Li anode interfaces Acta Phys. Sin. 70 136801
    [116]
    Nowak S, Berkemeier F and Schmitz G 2015 Ultra-thin LiPON films—Fundamental properties and application in solid state thin film model batteries J. Power Sources 275 144–50
    [117]
    Belous A G, V’yunov O I, Kovalenko L L, Bohnke O and Bohnke C 2014 Synthesis of thin-film electrodes based on LiPON and LiPON-LLTO-LiPON Russ. J. Electrochem. 50 523–30
    [118]
    Fujibayashi T, Kubota Y, Iwabuchi K and Yoshii N 2017 Highly conformal and high-ionic conductivity thin-film electrolyte for 3D-structured micro batteries: characterization of LiPON film deposited by MOCVD method AIP Adv. 7 085110
    [119]
    Li G, Li M, Dong L, Li X and Li D 2014 Low energy ion beam assisted deposition of controllable solid state electrolyte LiPON with increased mechanical properties and ionic conductivity Int. J. Hydrog. Energy 39 17466–72
    [120]
    Xie J, Oudenhoven J F M, Harks P-P R M L, Li D and Notten P H L 2015 Chemical vapor deposition of lithium phosphate thin-films for 3D all-solid-state li-ion batteries J. Electrochem. Soc. 162 A249–54
    [121]
    Kozen A C et al 2015 Atomic layer deposition of the solid electrolyte LiPON Chem. Mater. 27 5324–31
    [122]
    Nisula M, Shindo Y, Koga H and Karppinen M 2015 Atomic layer deposition of lithium phosphorus oxynitride Chem. Mater. 27 6987–93
    [123]
    Kim H T, Mun T, Park C, Jin S W and Park H Y 2013 Characteristics of lithium phosphorous oxynitride thin films deposited by metal-organic chemical vapor deposition technique J. Power Sources 244 641–5
    [124]
    Senevirathne K, Day C S, Gross M D, Lachgar A and Holzwarth N A W 2013 A new crystalline LiPON electrolyte: synthesis, properties, and electronic structure Solid State Ion. 233 95–101
  • 加载中

Catalog

    Figures(1)

    Article Metrics

    Article Views(813) PDF downloads(178)
    Article Statistics
    Related articles from

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return